JPH0738843Y2 - エネルギー分散型蛍光x線分析装置 - Google Patents
エネルギー分散型蛍光x線分析装置Info
- Publication number
- JPH0738843Y2 JPH0738843Y2 JP14883988U JP14883988U JPH0738843Y2 JP H0738843 Y2 JPH0738843 Y2 JP H0738843Y2 JP 14883988 U JP14883988 U JP 14883988U JP 14883988 U JP14883988 U JP 14883988U JP H0738843 Y2 JPH0738843 Y2 JP H0738843Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- energy dispersive
- fluorescence analyzer
- ray fluorescence
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 title claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14883988U JPH0738843Y2 (ja) | 1988-11-15 | 1988-11-15 | エネルギー分散型蛍光x線分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14883988U JPH0738843Y2 (ja) | 1988-11-15 | 1988-11-15 | エネルギー分散型蛍光x線分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0269751U JPH0269751U (en]) | 1990-05-28 |
JPH0738843Y2 true JPH0738843Y2 (ja) | 1995-09-06 |
Family
ID=31420524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14883988U Expired - Lifetime JPH0738843Y2 (ja) | 1988-11-15 | 1988-11-15 | エネルギー分散型蛍光x線分析装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0738843Y2 (en]) |
-
1988
- 1988-11-15 JP JP14883988U patent/JPH0738843Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0269751U (en]) | 1990-05-28 |
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